真空蝶阀
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APC 蝶阀-DeviceNET通讯界面设置
1. 阀
2. 处理室
3. 进气口
4. 压力传感器
5. 传感器线
6. 控制器和执行器
7. 连接遥控控制器
8. 连接电源线
9. 真空泵
APC 蝶阀剖面-DeviceNet
主要应用
真空压力控制和隔离阀门应用产业
>> SEMI - 半导体
>> FPD - 光电面板
>> CVD - 化学气相沉积
>> Solar - 太阳能
DeviceNet通讯界面
规格
>> 非常快速准确的压力控制
>> 阀门位置控制
>> 备用电源：有，用于停电时关闭阀门。
>> 传感器电源：24V DC 和±15V DC 均有
>> 2 个线性传感器或仿真线性物理量的输入
>> 仿真量和数字控制
>> 环境温度：≤ 70°C max.（控制器部分-24HR）
>> 远程控制（供客户选择）
>> 阀门可由主机（本地控制）通过RS232控制； 用于初始调整。
>> 状态和位置以绿色4位亮数字显示。
|
Model |
Connection |
Connection Type |
|
Power |
Power input |
DB-9 male |
|
Sensor |
Sensor input/ |
DB-15 female |
|
Interface |
DeviceNET |
M-12 male |
|
Digital I/O |
DI/DO |
M-8 male |
|
Node Address |
Address/ Baud rate |
8pin DIP switch |
|
Service |
APC service |
Mini USB female |
|
Monitor |
Show status |
Green LED display |
DeviceNet通讯界面的APC 软件功能
使用APC软件计算机控制提供便利操作功能
- 设定控制调整参数：GAIN
- 压力和位置控制模式
- 附表测试模式=> 1 cycle schedule
- 设置阀打开/关闭速度
- 记录APC HW/SW 版本, 序列号和型号
- 记录阀门循环和运行时间
- 设置公差范围的压力
- 循环寿命和压力控制记录
- 控制器参数上传和下载
- 断电保护功能
- 压力学习功能
APC蝶阀-DeviceNet通讯界面规格
|
Valve unit |
||
|
Material |
Body |
304S.S. (*1) |
|
Plate |
304S.S. (*1) |
|
|
Shaft |
304S.S. |
|
|
Gate seal |
Viton |
|
|
Shaft seal |
Viton |
|
|
Flange |
KF、ISO、CF |
|
|
Mounting position |
Any |
|
|
Cycles until first service |
Pressure control |
2,000,000(*2) |
|
Closing / Opening |
250,000 |
|
|
Helium leak rate at 1 atm differential |
< 1 x 10-9 mbar．l/sec |
|
|
Pressure range |
1 x 10-8 mbar to 1.2 bar |
|
|
Operating temperature |
Body |
10°C to 110°C |
| Actuator | Step Motor | |
|
Standard accessories |
M12 Single-Ended Cordset, 5 Poles, Female (Straight) to Pigtail by CAN Bus, |
|
(*1) Body and Plate material can choose aluminum alloy.
(*2) The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)
(*3) If there is particle issue in the working condition of the valve , please clean the valve plate and body regularly and apply some vacuum grease on these parts.
|
Control and actuating unit |
|||
|
Input voltage |
+24 VDC (±10%) |
connector: POWER |
|
|
Power consumption |
100W max. (Controller + Motor + Sensor + Power Failure) |
connector: POWER |
|
|
Sensor power supply output |
+24 VDC /+-15VDC, 500 mA |
connector: SENSOR |
|
|
Analog input |
|||
|
Q’ty of sensors |
Independent 2 channel |
connector: SENSOR |
|
|
Input voltage |
0-10V DC linear Physical quantity |
connector: SENSOR |
|
|
Resolution |
12bit |
2.3 mV |
connector: SENSOR |
|
24bit |
0.5 mV |
connector: SENSOR |
|
|
Input resistance |
Ri = 21 kΩ |
connector: SENSOR |
|
|
Digital Input/ Output |
|||
|
Input |
Independent 2 channel |
connector: INTERFACE |
|
|
Output |
Independent 2 channel |
connector: INTERFACE |
|
|
Ambient temperature |
≤ 70°C -24HR |
||
|
Control accuracy |
0.1% of maximum sensor range |
||
|
Backup power |
Yes |
||
|
KF25,KF40,KF50,CF35 |
|||
|
Closing time |
<0.85sec |
||
|
Opening time |
<0.85sec |
||
|
Valve max. torque |
50kg-cm |
||
|
Position resolution |
8000 (steps 0-90 rotation) |
||
|
ISO63, ISO80, ISO100, CF63, CF100 |
|||
|
Closing time |
<0.85sec |
||
|
Opening time |
<0.85sec |
||
|
Valve max. torque |
50kg-cm |
||
|
Position resolution |
8000 (steps 0-90 rotation) |
||
|
ISO160, CF150 |
|||
|
Closing time |
<3.5sec |
||
|
Opening time |
<3.5sec |
||
|
Valve max. torque |
90kg-cm |
||
|
Position resolution |
2400 (steps 0-90 rotation) |
||
真空蝶阀的功能通常是阻绝或是调节流量, 其关闭的机构主要为一个圆型片, 操作的方式和真空球阀很类似, 可以快速的开启或关闭, 蝶阀受到欢迎的主要原因是重量比较轻, 就不需要太多的支撑。
Htc日扬真空提供许多种真空蝶阀具备蝶阀本体与控制器, 特色为具备蝶阀开合度调节真空压力, 使用寿命长, 品质质量稳定，产品出厂全部用氦质谱检漏仪检测, 由于坚固的机构设计可以数年连续使用阀门而无须维修. 真空蝶阀阀门驱动的方式有手动蝶阀, 气动蝶阀和马达带动蝶阀等不同方式, 客户可以视实际的应用来选购适合的真空蝶阀。
有一个特别注意事项就是当真空蝶阀阀门全开后, 若见到圆型片是突出于阀体之外时, 此圆形片有可能会与连接在蝶阀两端的管子内部表面干涉, 故建议使用者在安装之前先确认欲安装的管子内径是否符合蝶阀型录规格表中的最小尺寸。
