フロントエンドのスレッド、実軸
磁性流体フィードスルー
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Model No. | ST005 | ST006 | ST010 | ST020 |
Parts No. | 1000FF012001 | 1000FF012002 | 1000FF012003 | 1000FF012004 |
A | Ø5 -0.010/-0.022 | Ø6 +0/-0.018 | Ø10 -0.013/-0.028 | Ø20 -0.020/-0.041 |
B | 32 | 42 | 52 | 60 |
C | 6 | 10 | 30 | 34 |
D | 12.5 | 15 | 23 | 36 |
E | 15 | 15 | 23 | 36 |
F | 16 | 28 | 38 | 54 |
G | M8xP1 | M12xP1.25 | M25xP1.5 | M40xP1.5 |
H | - | 0.5Dp*10Lg(Flat) | 3W*1.8Dp*20Lg | 6W*3.5Dp*32Lg |
Torque(kg-cm) | 9.2 | 15.2 | 76 | 570 |
Select | Model No. | Parts No. | A | B | C | D | E | F | G | H | Torque(kg-cm) |
ST005 | 1000FF012001 | Ø5 -0.010/-0.022 | 32 | 6 | 12.5 | 15 | 16 | M8xP1 | - | 9.2 | |
ST006 | 1000FF012002 | Ø6 +0/-0.018 | 42 | 10 | 15 | 15 | 28 | M12xP1.25 | 0.5Dp*10Lg(Flat) | 15.2 | |
ST010 | 1000FF012003 | Ø10 -0.013/-0.028 | 52 | 30 | 23 | 23 | 38 | M25xP1.5 | 3W*1.8Dp*20Lg | 76 | |
ST020 | 1000FF012004 | Ø20 -0.020/-0.041 | 60 | 34 | 36 | 36 | 54 | M40xP1.5 | 6W*3.5Dp*32Lg | 570 |
Degree Vacuum pressure [Pa]: 10-6
Leakage rate(He) [Pa.m3/sec]: <10-12
Temperature range(oC): 0 ~ 80oC (Adding water ooling structure if it is beyond this temperture range)