圧空式ペントロールバルブ（単動）

Material

Body

A6061-T6

Gate

A6061-T6

Life Cycle

200,000 cycles

Helium leak rates at

1 atm differential

Body, Aluminum

＜1×10^-9 mbar .l /sec

Body, Aluminum, hard anodized

＜1×10^-5 mbar .l /sec

Bake Temperature

Body

≤ 120 ℃

Actuator

≤ 80 ℃

Solenoid valve

≤ 50 ℃

Pressure Range

Aluminum

1×10^-8 mbar to 1.2 bar

Aluminum ,hard anodized

1×10^-6 mbar to 1.2 bar

Maximum ΔP

1.2 bar

Max. ΔP during opening

≤ 5 mbar

Compressed air pressure

4 ~ 6 Kg/cm²

Operating time for throttling(s)

ISO 200

ISO 250

ISO 320

ISO 400

0.9

1.0

1.1

2

gate board moving time *

openàclosed(s)

2.0

2.0

2.0

3.5

gate board moving time *

closed à open(s)

1.0

1.0

1.0

3

Standard Seal

Gate

Viton O-ring

Bonnet

Viton O-ring

Feedthrough

Viton O-ring

Feedthrough

Rotary feedthrough

Actuator

Electro-Pneumatic (normal close)

Position indicator

Reed sensor

Weight

ISO 200

ISO 250

ISO 320

ISO 400

21Kg

31Kg

51Kg

70 Kg

Mounting position

Horizontal & Vertical

Options

ISO 200 ~ 320

a. Other material of Gate O-ring

b. Heater

ISO 400

a. Other material of Gate O-ring