3ポジションバターフライバルブ

日揚科技(Htc vacuum)の3ポジションバターフライバルブは回転シリンダーで駆動するバルブです。3ポジションバタフライバルブの特徴は取付簡単、小サイズ、長サイクルです。そのバルブは全開から全閉まで(0～90°)の間に第3位置の開度を設定可能です。Htc vacuum 3-position butterfly valve has 3^rd position function, easy installation, small size and long life cycles. The 3-position butterfly valve opening can be set from 0-90°. Main application of Htc 3-position butterfly valve will be fully isolated contaminating and aggressive gas in processes. The valve is located between pump and process chamber and 3^rd position can be set to change the conductance.

Main applications

Compact isolation valve for high conductance clean processes.

Has a 3^rd position to change the conductance. One has two functions.

Application process

• FPD
• SEMI
• PVD