- Vacuum Chambers
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Vacuum valves
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Vacuum Butterfly Valves
- APC Butterfly Valve-DeviceNET
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- Htc Pneumatic Butterfly Valve
- 3-Position butterfly Valve
- High vacuum butterfly Valve
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Vacuum Pump
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EBARA Dry Pump Repair kits
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- A150W - EBARA dry pump kits
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- AA10 - EBARA dry pump kits
- AA20 - EBARA dry pump kits
- AA40 - EBARA dry pump kits
- AA200 - EBARA dry pump kits
- Sanitary Fittings
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Vacuum Butterfly Valves
※ Please select product classify ※
Htc vacuum 3-position butterfly valve is driven by rotating cylinder valve. Htc vacuum 3-position butterfly valve has 3rd position function, easy installation, small size and long life cycles. The 3-position butterfly valve opening can be set from 0-90°. Main application of Htc 3-position butterfly valve will be fully isolated contaminating and aggressive gas in processes. The valve is located between pump and process chamber and 3rd position can be set to change the conductance.
Main applications
Compact isolation valve for high conductance clean processes.
Has a 3rd position to change the conductance. One has two functions.
Application process
- FPD
- SEMI
- PVD
Vacuum butterfly valve is a valve which can be used for isolating or regulating flow. The closing mechanism takes the form of a disk. Operation is similar to that of a ball valve, which allows for quick shut off. Butterfly valves are generally favored because they are lighter in weight, meaning less support is required.
Htc vacuum provides various butterfly valves which features long service life, high quality and high performance, the robust and rugged design can be relied upon for years of trouble free service. There are manual, pneumatic and electric actuators butterfly valve available for different applications. One thing should be aware is that when the butterfly valve is fully open and the disk is protrusive from the valve body, the disk might interfere the inner surface of the connecting duct, users should check the minimum ID of connecting duct before installation.
