- Vacuum Chambers
- UHV Vacuum Chamber
-
Vacuum valves
- Vacuum poppet valves
- Aluminum alloy angle valve
- Vacuum Gate Valves
-
Vacuum Butterfly Valves
- APC Butterfly Valve-DeviceNET
- APC butterfly Valve-ModBUS
- APC Butterfly Valve-EtherCAT
- Htc Pneumatic Butterfly Valve
- 3-Position butterfly Valve
- High vacuum butterfly Valve
- Low vacuum Butterfly Valve
- BV-D Series Butterfly Valve
- BV-N Series Butterfly Valve
- X-Series Butterfly Valve
- MBV-LD Series Butterfly Valve
- MBV-AD Series Butterfly Valve
- Rectangular Gate Valve
- Pendulum valve
- Teflon Coating Vacuum Valve
- Vacuum Ball Valve
- Vacuum Check Valves
- Venting Valve/Pumping Valve
- All Metal Valves
- Vacuum Valve kits
- Vacuum Components
-
Vacuum Pump
- Edwards Turbomolecular Pumps
- Scroll Vacuum Pumps
- Refurbished vacuum Pump
-
EBARA Dry Pump Repair kits
- A07 - EBARA dry pump kits
- A10S - EBARA dry pump kits
- A30 - EBARA dry pump kits
- A70W - EBARA dry pump kits
- A150W - EBARA dry pump kits
- 40.20 - EBARA dry pump kits
- 50.20 - EBARA dry pump kits
- 80.25 - EBARA dry pump kits
- 150.40 - EBARA dry pump kits
- AA10 - EBARA dry pump kits
- AA20 - EBARA dry pump kits
- AA40 - EBARA dry pump kits
- AA200 - EBARA dry pump kits
- Sanitary Fittings
- Perfluoroelastomer O'ring (FFKM)
- Local Wet Scrubber
- Energy-Saving Heat Jacket
Vacuum Butterfly Valves
※ Please select product classify ※
Htc Pneumatic Butterfly Valve
KF TYPE pneumatic butterfly valve
ISO-F TYPE air actuated butterfly valve
ISO-K TYPE pneumatic butterfly valve
Pneumatic butterfly valve-gate system settings
B : Htc pneumatic butterfly valve
C : Process chamber
D : Gauge
E : Gas inlet
Application
Htc Pneumatic butterfly valve is driven by rotating cylinder valve. The seal plate compacts O-ring isolated from the vacuum and atmosphere completely. Htc Pneumatic butterfly valve has advantages as quick opening and closing, easy installation, small size and long life cycles. Main application of Htc Pneumatic butterfly valve will be fully isolated contaminating and aggressive gas in processes. And the valve is located between pump and process chamber.
Application process
>> FPD - Flat Panel Display
>> SEMI - Semiconductor
>> PVD - Physical Vapor Deposition
Design principle / features
♦ Fast closing and opening time.
♦ Isolate vacuum and atmosphere.
♦ Position indicator.
♦ Any mounting position.
♦ Extremely cycle life.
♦ High conductance.
Classify
♦ KF25 / KF40 / KF50
♦ ISO63 / ISO100 / ISO160 / ISO200 / ISO250
Body / P late / Shaft Material
Stainless steel
Vacuum butterfly valve is a valve which can be used for isolating or regulating flow. The closing mechanism takes the form of a disk. Operation is similar to that of a ball valve, which allows for quick shut off. Butterfly valves are generally favored because they are lighter in weight, meaning less support is required.
Htc vacuum provides various butterfly valves which features long service life, high quality and high performance, the robust and rugged design can be relied upon for years of trouble free service. There are manual, pneumatic and electric actuators butterfly valve available for different applications. One thing should be aware is that when the butterfly valve is fully open and the disk is protrusive from the valve body, the disk might interfere the inner surface of the connecting duct, users should check the minimum ID of connecting duct before installation.
