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Vacuum valves
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Vacuum Butterfly Valves
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Vacuum Pump
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EBARA Dry Pump Repair kits
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- Sanitary Fittings
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Vacuum poppet valves
※ Please select product classify ※
Y-inline Valve | Pneumatically Actuated
KF Flange with Bellows / Single Acting(USA)
CF Rotatable Flange with Bellows / Single Acting(USA)
KF Flange with Bellows Attached Reed Sensor / Single Acting(USA)
CF rotatable Flange with Bellows Attached Reed Sensor / Single Acting(USA)
Vacuum Y type inline valve is one type of the pneumatic poppet control valves. When the pneumatic poppet is moved toward the top of the valve, the internal body cavity is open to the system, and flow is unimpeded (maximum conductance). Once the actuator moves the poppet to the bottom of the valve, an elastomer sealing ring is compressed onto the sealing surface of the lower body of the valve. This action creates a vacuum tight seal and stops the flow. Htc vacuum offers a wide variety of valve types in a comprehensive range of sizes. They are manually and pneumatically, with bellows and without bellows. Port terminations are available in KF, ISO, CF, and Tube End. Htc vacuum designs all series angle valves suited for vacuum applications with venting processes, high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
- Body: 304 S.S. (Other material available upon request)
- Poppet: 304 S.S. (Other material available upon request)
- Port ODs: 3/4 ~ 8 inch (19.05 ~ 203.2mm)
- Bellows: Welded AM-350(option)
- Position indicator: Option
- Solenoid: Option
- Valve stem seal: Viton O'ring
- Leak rate: 2×10-9 mbar-l/sec
- Pressure range: 1×10-9mbar to 1000 mbar Viton seal bonnet
- Maximun △pressure before opening: 1.2 Bar
- Operating air pressure: 4 ~ 6.5 kg/cm2
- Cycles until service: 3/4 to 2 inch (19.05 to 50.8mm) -- 500,000 times
(full orifice open) 2.5 to 6 inch (63.5 to 152.4mm) -- 250,000 times
8 inch to larger (203.2mm to larger) -- application dependent - Bake-out limitation:
Bake Temperature
Valve body
O-ring bonnet seal
Open ≤ 100℃
Close ≤ 100℃
metal bonnet sea
Open ≤ 200℃
Close ≤ 150℃
Manual and pneumatic actuator
≤ 80℃
Warranty conditions :
1. The period of warranty shall start from the date of delivery of the product to the customer and shall cover a period of 1 year, or the specific life cycles, whichever comes first.
2. Operation only in air, inert gas and vacuum.
3. Warranty will not apply to the damages caused by nature disasters, faulty usages or consumable purposes.
Please offer your drawings to contact us, our sales specialized services person will contact and quote for you.
Htc keeps the continuous improving on the product quality and lifting the product benefits.
- The cylinder of isolation valve will be changed to be as aluminum integrally formed one because of the accuracy and good quality of aluminum cylinder.
The modified spec: KF16 to 50, CF16 to 35 (under 2inch) for all types of isolation valves including angle, I(Z)-type, Y-type.
Htc vacuum poppet valve will function reliably in applications ranging from semiconductor production system with chemical and particulate contamination. They can be used in rough vacuum, high vacuum , or ultra-high vacuum environment.
Htc vacuum poppet valves have KF, ISO and ANSI port models, are designed for high vacuum applications where vacuum pressures approximate 10-9 mbar and bake-out temperature do not exceed 150℃. Htc vacuum offers manual operated poppet valves or pneumatic actuated poppet valves with bellows attached reed sensor, include angle valves, z-inline valves, y-inline valves, and vacuum ball valves.
Vacuum poppet valve specifications
- Body: 304 S.S. (Other material available upon request)
- Poppet: 304 S.S. (Other material available upon reques)
- Bellows: Welded AM-350 (option)
- Solenoid: Option
- Position indicator: Option
- Seal: Viton Oring
- Leak rate: 2x10-9 mbar.l/sec
- Pressure range: 1x10-9 mbar to 1000 mbar Viton seal bonnet
- MaximumΔpressure before opening: 1.2 bar
- Opening air pressure: 4 to 6.5 kg/cm2
- Cycles until service:
Bellows type:16 to 50~500,000 ; 63 to 150~250,000 ; 200 to 250~80,000
No Bellows type: 10 to 50~200,000 ; 63 to 250~100,000 (Depend on Oring condition)
No Bellows type : Suggest to install in vertical orientation - BakeTemperature:
Valve Body Oring bonnet seal Open ≤ 100℃ Close ≤ 100℃ Metal bonnet seal Open ≤ 200℃ Close ≤ 150℃ Manual and pneumatic actuator ≤ 80℃ - Large or special size available upon request
