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Pendulum valve

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Specification

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APC Pendulum Valve

3 Position pendulum valve

Pneumatic Pendulum Valve (Double Acting)

Pneumatic Pendulum Valve (Single Acting)

APC Pendulum Valve

Step Motor Actuated APC pendulum valve

Hard anodized Step Motor Actuated APC pendulum valve

APC pendulum valve acting video

APC pendulum valve gate system settings

1. Valve
2. Process chamber
3. Gas inlet
4. Pressure sensor(s)
5. Sensor cable(s)
6. Controller and actuator
7. Cable to remote control unit
8. Cable to power supply
9. Pump

Main applications

Downstream pressure control and isolation valve.

Applcation process

>> SEMI - Semiconductor
>> FPD - Flat Panel Display
>> CVD - Chemical Vapor Deposition
>> Solar

Features

Integrated pressure controller
Accurate pressure control
Compact isolation
Short response time
Friendly user interface

APC Connect Port

Model	Connection	Type
Power	Power input	DB-9 male
Sensor (Vacuum Gauge)	Sensor input/ Sensor power supply	DB-15 female
Interface	RS232 RS485(Option)	DB-25 female
Service	APC service	Mini USB type B female
Monitor	Show status	Green LED display

Specifications

Sensor supply : 24V DC or ±15V DC
Backup power : Yes
Sensor input
－ Q'ty of sensors：2 pcs
－ Vacuum gauge: Linear / Exponent
－ Signal voltage：0-10V DC linear with pressure
－ Input resistance：Ri=21 k Ω
－ Resolution：2.3 mV
－ Sample rate：1ms
Control accuracy：0.1% of maximum sensor range
Analog\Digital Easy Control
Position resolution：8000 (step 0-75° rotation)
Ambient temperature: 70°C max(Controller part -24HR)

APC software functions

Control via computer by using the APC software offers convenient functions

Set control tuning parameter : GAIN
Pressure and position control mode
Schedule test Mode => 1 cycle schedule
Set valve open/close speed
Report APC HW/SW version, serial and model number
Report valve cycles and run hours
Set tolerance scope of pressure
Cycles life and pressure control record
Controller parameter upload and download
Power failure protection
Learning function

apc pendulum valve software

Control and actuating unit
Input voltage	+24 VDC(±10%)	connector: POWER
Power consumption	150W(controller + motor)	connector: POWER
Sensor power supply output	+24 VDC /+-15VDC， 500 mA	connector: SENSOR
Analog input
Q’ty of sensors	Independent 2 channel	connector: SENSOR
Input voltage	0-10V DC linear	connector: SENSOR
Resolution	2.3 mV	connector: SENSOR
Input resistance	Ri=21kΩ	connector: SENSOR
Analog output
Q’ty of sensors	Independent 2 channel	connector: INTERFACE
Outputs voltage	0-10V DC linear	connector: INTERFACE
Digital Input/ Output
Input	Independent 2 channel	connector: INTERFACE
Output	Independent 2 channel	connector: INTERFACE
Admissible operating temperature
Valve	120 ℃
Controller	70 ℃
Control accuracy	0.1% of maximum sensor range
Position resolution	8000 (step 0-90〫rotation)
Backup power	Yes
ISO 200
Closing time	<1.2sec
opening time	<1.2sec
Valve max. torque	270kg-cm
ISO 250
Closing time	<1.2sec
opening time	<1.2sec
Valve max. torque	880kg-cm
ISO 320
Closing time	<3.0sec
opening time	<3.0sec
Valve max. torque	880kg-cm

Technical Data
Material	Body		A6061-T6
	Gate		A6061-T6
Life Cycle	Closing/Opening		200,000 cycles
	Pressure Control		1,000,000 cycles
Helium leak rates at 1 atm differential	Body Aluminum		＜1×10^-9 mbar .l /sec
	Body Aluminum ,hard anodized		＜1×10^-5 mbar .l /sec
Bake Temperature	Body		≤ 120 ℃
	Actuator		≤ 70 ℃
	Control box		≤ 70 ℃
Pressure Range	Aluminum		1×10^-8 mbar to 1.2 bar
	Aluminum ,hard anodized		1×10^-6 mbar to 1.2 bar
Maximum ΔP	1.2 bar
Max. ΔP during opening	≤ 5 mbar
Compressed air pressure	4 ~ 6 Kg/cm²
Opening/Closing time(sec)	ISO 200	ISO 250		ISO 320
	1.2/1.2	1.2/1.2		2.0/2.0
Standard Seal	Gate		Viton O-ring
	Bonnet		Viton O-ring
Weight	ISO 200	ISO 250		ISO 320
	22Kg	31Kg		51Kg
Actuator	Step Motor
Mounting position	Horizontal & vertical			Horizontal
Options	Other material of Gate O-ring

HTC vacuum pendulum valve is to install a large throttle valve between the process vacuum chamber and the turbine molecular pump inlet. The current pendulum valve design are constructed of body material blank or hard anodized for corrosion resistant and less dust. It's available with ISO200, ISO250, ISO 320 flanges in sizes 8", 10", 12" and can be operated in pneumatic, 3-Position or APC mode. This vacuum valve is usually designed as a gate valve or a pendulum valve, applications in OLED, FPD, Semiconductor and PV industries manufacturing systems.

The pendulum valve used in the CVD process, etching process, and for chemical technology application it can be great safety too. This valve’s body in size is smaller, the space utilization is better, it has less vibration for the process when it is operating, also it is corrosion-resistant. We also have two kinds of surface treatment: the Nickel plating and the Anode hard coating. During it is processing there’s less visibility of dust, and it is easy to disassemble the equipment for maintenance, and no need to dismantle the entire equipment.