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Pendulum valve

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APC Pendulum Valve

3 Position pendulum valve

Pneumatic Pendulum Valve (Double Acting)

Pneumatic Pendulum Valve (Single Acting)

Pneumatic Pendulum Valve (Double Acting)

Pneumatic pendulum valve of vacuum valves for high vacuum chamber control system by Htc vacuum

Pneumatica Pendulum Valve (Double Acting)

Pendulum Valve (Double Acting) - Hard anodized

Material	Body		A6061-T6
	Gate		A6061-T6
Life Cycle	200,000 cycles
Helium leak rates at 1 atm differential	Body Aluminum		＜1×10^-9 mbar .l /sec
	Body Aluminum ,hard anodized		＜1×10^-5 mbar .l /sec
Bake Temperature	Body		≤ 120 ℃
	Actuator		≤ 80 ℃
	Solenoid valve		≤ 50 ℃
Pressure Range	Aluminum		1×10^-8 mbar to 1.2 bar
	Aluminum ,hard anodized		1×10^-6 mbar to 1.2 bar
Maximum ΔP	1.2 bar
Max. ΔP during opening	≤ 5 mbar
Compressed air pressure	4 ~ 6 Kg/cm²
Opening / Closing time	ISO 200	ISO 250		ISO 320
	1.2/1.2	1.2/1.2		2.0/2.0
Standard Seal	Gate		Viton O-ring
	Bonnet		Viton O-ring
Actuator	Electro-Pneumatic
Weight	ISO 200	ISO 250		ISO 320
	21Kg	31Kg		51Kg
Mounting position	Horizontal & Vertical
Options	a. Other material of Gate O-ring b. Heater

Design principle / features：

1. Low Vibration
2. Corrosion resistant
3. less dust
4. Easy disassembly
5. More Differential pressure

Specification ：

1.Size: ISO200, ISO250
2.Body Material : Aluminium 6061-T6
3.Gate material: Aluminium 6061-T6
4.Body Surface treatment : Blank or Hard anodized Aluminum
5.Mounting position : Horizontal (cylinder up) or vertical
6.CDA pressure: 4-6 kg/cm²

Control Wiring Externa

HTC vacuum pendulum valve is to install a large throttle valve between the process vacuum chamber and the turbine molecular pump inlet. The current pendulum valve design are constructed of body material blank or hard anodized for corrosion resistant and less dust. It's available with ISO200, ISO250, ISO 320 flanges in sizes 8", 10", 12" and can be operated in pneumatic, 3-Position or APC mode. This vacuum valve is usually designed as a gate valve or a pendulum valve, applications in OLED, FPD, Semiconductor and PV industries manufacturing systems.

The pendulum valve used in the CVD process, etching process, and for chemical technology application it can be great safety too. This valve’s body in size is smaller, the space utilization is better, it has less vibration for the process when it is operating, also it is corrosion-resistant. We also have two kinds of surface treatment: the Nickel plating and the Anode hard coating. During it is processing there’s less visibility of dust, and it is easy to disassemble the equipment for maintenance, and no need to dismantle the entire equipment.