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Pendulum valve

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APC Pendulum Valve

3 Position pendulum valve

Pneumatic Pendulum Valve (Double Acting)

Pneumatic Pendulum Valve (Single Acting)

3 Position pendulum valve

3 Position Pendulum Valve (Double Acting)

Hard anodized 3 Position Pendulum Valve (Double Acting)

3 Position Pendulum Valve (Normal Close)

3-position pendulum valve attached reed sensor offers much better pressure control

Htc vacuum 3-Position pendulum valves achieve vacuum isolation and vacuum pressure control via an adjustable air cylinder. The pendulum valves attached reed sensor, let the controller and valve to go open, closed or to the third position, provide control better set point accuracy and repeatability.

Htc vacuum pendulum pressure control system with high-performance, closed-loop motor control throttling pendulum valves, controllers and pressure gauges. It improve the pressure control performance and replace of the traditional gate valves at a reduced cost.

The less friction ,the less particle.

Material	Body		A6061-T6
	Gate		A6061-T6
Life Cycle	200,000 cycles
Helium leak rates at 1 atm differential	Body Aluminum		＜1×10^-9 mbar .l /sec
	Body Aluminum ,hard anodized		＜1×10^-5 mbar .l /sec
Bake Temperature	Body		≤ 120 ℃
	Actuator		≤ 80 ℃
	Solenoid valve		≤ 50 ℃
Pressure Range	Aluminum		1×10^-8 mbar to 1.2 bar
	Aluminum ,hard anodized		1×10^-6 mbar to 1.2 bar
Maximum ΔP	1.2 bar
Max. ΔP during opening	≤ 5 mbar
Compressed air pressure	4 ~ 6 Kg/cm²
Opening / Closing time	ISO 200	ISO 250		ISO 320
	1.2/1.2	1.2/1.2		2.0/2.0
Standard Seal	Gate		Viton O-ring
	Bonnet		Viton O-ring
Actuator	Electro-Pneumatic and Manual
Weight	ISO 200	ISO 250		ISO 320
	22Kg	32Kg		52Kg
Mounting position	Horizontal or Vertical
Options	a. Other material of Gate O-ring b. Heater

Control Wiring Extern

Pin	Function	Status
1	Power supply 24VDC		P
2	Power GROUND		P
3	Open signal input		I
4	Close signal input		I
5	Three-segment signal input		I
6	Reserved		x
7	Open signal output		O
8	Close signal output		O
9	Power supply 24VDC		P
10	Power GROUND		P
11	Three-segmentA signal output		O
12	Three-segmentB signal output		O
13	Reserved		x
14	Reserved		x

HTC vacuum pendulum valve is to install a large throttle valve between the process vacuum chamber and the turbine molecular pump inlet. The current pendulum valve design are constructed of body material blank or hard anodized for corrosion resistant and less dust. It's available with ISO200, ISO250, ISO 320 flanges in sizes 8", 10", 12" and can be operated in pneumatic, 3-Position or APC mode. This vacuum valve is usually designed as a gate valve or a pendulum valve, applications in OLED, FPD, Semiconductor and PV industries manufacturing systems.

The pendulum valve used in the CVD process, etching process, and for chemical technology application it can be great safety too. This valve’s body in size is smaller, the space utilization is better, it has less vibration for the process when it is operating, also it is corrosion-resistant. We also have two kinds of surface treatment: the Nickel plating and the Anode hard coating. During it is processing there’s less visibility of dust, and it is easy to disassemble the equipment for maintenance, and no need to dismantle the entire equipment.