Vacuum Butterfly Valves
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APC Butterfly Valve-DeviceNET
CF TYPE APC BUTTERFLY VALVE with DeviceNet
KF TYPE APC BUTTERFLY VALVE with DeviceNet
ISO-F TYPE APC BUTTERFLY VALVE with DeviceNet
APC butterfly valve for DeviceNet gate system settings
1. Valve
2. Process chamber
3. Gas inlet
4. Pressure sensor(s)
5. Sensor cable(s)
6. Controller and actuator
7. Cable to remote control unit
8. Cable to power supply
9. Pump
APC Butterfly Valve for DeviceNET
Main applications
Downstream pressure control and isolation valve.Applications process
>> SEMI - Semiconductor
>> FPD - Flat Panel Display
>> CVD - Chemical Vapor Deposition
>> Solar
APC Butterfly valve-DeviceNet
Specifications
>> Very fast and accurate pressure control
>> Valve position control
>> Backup power：Yes, for the valve at power failure
>> Sensor supply power：24V DC and ±15V DC both have
>> Inputs for 2 linear sensors or analog linear physical quantity
>> Analog and Digital Easy Control
>> Ambient temperature: ≤ 70°C max. (Controller part -24HR)
>> Remote control (for customer optional)
>> The valve can be controlled by a host (local) via RS232; For initial adjustment.
>> Status and position are displayed by means of green 4 bright digits.
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Model |
Connection |
Connection Type |
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Power |
Power input |
DB-9 male |
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Sensor |
Sensor input/ |
DB-15 female |
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Interface |
DeviceNET |
M-12 male |
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Digital I/O |
DI/DO |
M-8 male |
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Node Address |
Address/ Baud rate |
8pin DIP switch |
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Service |
APC service |
Mini USB female |
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Monitor |
Show status |
Green LED display |
APC software functions for DeviceNet
Control via computer by using the APC software offers convenient functions
- Set control tuning parameter：PID GAIN
- Pressure and position control mode
- Schedule test Mode=> 1 cycle schedule
- Set valve open/close speed
- Report APC HW/SW version, serial and model number
- Report valve cycles and run hours
- Set tolerance scope of pressure
- Cycles life and pressure control record
- Controller parameter upload and download
- Power failure protection
- Learning function
APC butterfly valve for DeviceNet specification
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Valve unit |
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Material |
Body |
304S.S. (*1) |
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Plate |
304S.S. (*1) |
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Shaft |
304S.S. |
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Gate seal |
Viton |
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Shaft seal |
Viton |
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Flange |
KF、ISO、CF |
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Mounting position |
Any |
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Cycles until first service |
Pressure control |
2,000,000(*2) |
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Closing / Opening |
250,000 |
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Helium leak rate at 1 atm differential |
< 1 x 10-9 mbar．l/sec |
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Pressure range |
1 x 10-8 mbar to 1.2 bar |
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Operating temperature |
Body |
10°C to 110°C |
| Actuator | Step Motor | |
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Standard accessories |
M12 Single-Ended Cordset, 5 Poles, Female (Straight) to Pigtail by CAN Bus, |
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(*1) Body and Plate material can choose aluminum alloy.
(*2) The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)
(*3) If there is particle issue in the working condition of the valve , please clean the valve plate and body regularly and apply some vacuum grease on these parts.
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Control and actuating unit |
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Input voltage |
+24 VDC (±10%) |
connector: POWER |
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Power consumption |
100W max. (Controller + Motor + Sensor + Power Failure) |
connector: POWER |
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Sensor power supply output |
+24 VDC /+-15VDC, 500 mA |
connector: SENSOR |
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Analog input |
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Q’ty of sensors |
Independent 2 channel |
connector: SENSOR |
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Input voltage |
0-10V DC linear Physical quantity |
connector: SENSOR |
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Resolution |
12bit |
2.3 mV |
connector: SENSOR |
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24bit |
0.5 mV |
connector: SENSOR |
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Input resistance |
Ri = 21 kΩ |
connector: SENSOR |
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Digital Input/ Output |
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Input |
Independent 2 channel |
connector: INTERFACE |
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Output |
Independent 2 channel |
connector: INTERFACE |
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Ambient temperature |
≤ 70°C -24HR |
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Control accuracy |
0.1% of maximum sensor range |
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Backup power |
Yes |
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KF25,KF40,KF50,CF35 |
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Closing time |
<0.85sec |
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Opening time |
<0.85sec |
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Valve max. torque |
50kg-cm |
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Position resolution |
8000 (steps 0-90 rotation) |
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ISO63, ISO80, ISO100, CF63, CF100 |
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Closing time |
<0.85sec |
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Opening time |
<0.85sec |
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Valve max. torque |
50kg-cm |
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Position resolution |
8000 (steps 0-90 rotation) |
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ISO160, CF150 |
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Closing time |
<3.5sec |
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Opening time |
<3.5sec |
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Valve max. torque |
90kg-cm |
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Position resolution |
2400 (steps 0-90 rotation) |
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Vacuum butterfly valve is a valve which can be used for isolating or regulating flow. The closing mechanism takes the form of a disk. Operation is similar to that of a ball valve, which allows for quick shut off. Butterfly valves are generally favored because they are lighter in weight, meaning less support is required.
Htc vacuum provides various butterfly valves which features long service life, high quality and high performance, the robust and rugged design can be relied upon for years of trouble free service. There are manual, pneumatic and electric actuators butterfly valve available for different applications. One thing should be aware is that when the butterfly valve is fully open and the disk is protrusive from the valve body, the disk might interfere the inner surface of the connecting duct, users should check the minimum ID of connecting duct before installation.
