Bakeable All Metal Valves

Bakeable all-metal valves are one type of the poppet valves. There are 3 kinds of type:all-metal valve angle and Y-inline valves and Mini type all-metal valve. When the poppet is moved toward the top of the valve, the internal body cavity is open to the system, and flow is unimpeded (maximum conductance). Once the actuator moves the poppet to the bottom of the valve, a copper gasket sealing ring is compressed onto the sealing surface of the lower body of the valve. This action creates a vacuum tight seal and stops the flow.

Htc vacuum offers the bakeable all-metal valves are designed to use for use in ultra-high vacuum environment and applications in semiconductor manufacturing, synchronous radiation, vacuum thin film technology, etc. where elevated temperatures preclude the use of elastomers and low temperature gasket metals. Htc vacuum designs all series angle valves and inline valves suited for vacuum applications with venting processes,high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

Angle Valve  & Straight Through Valve

• Temperature operating range: Bakeable to :400C(open), 300C(close).
• Pressure Range : 1x10^-10mbar to 1000 mbar
• All stainless steel construction.
• Leak Rate : 5x10^-10mbar·l/sec.
• Closure Torque :
  -- CR16 First 150kg-cm, Maximum 250kg-cm.
  -- CR35 First 300kg-cm, Maximum 600kg-cm.
  -- CR63 First 300kg-cm,Maximum 900 kg-cm.
  
  
• Life cycle (used for gasket sealing):
  -- CR16: 300 times in mounting the vertical or horizontal direction.
  -- CR35: 300 times in mounting the vertical or horizontal direction.
  -- CR63: 300 times in mounting the vertical direction / 100 times in mounting the horizontal direction.
  
  
• Orientation : Any position.

Mini type-All Metal Valve

• Temperature operating range: Bakeable to: 400^oC(open), 300^oC(close)
• Pressure Range: 1x10^-10mbar~1000mbar
• All stainless steel construction
• Bellows stem seal
• Leak Rate: 5x10^-10 mbar.l/sec
• Closure Torque: CR16 First 90~120kg-cm, Maximum 200kg-cm.
• Life Cycle(for Gasket Seal) : 1,000
• Orientation: Any position