Pneumatic pendulum valve of vacuum valves for high vacuum chamber control system by Htc vacuum

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Pendulum valve

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Specification

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APC Pendulum Valve

3 Position pendulum valve

Pneumatic Pendulum Valve (Double Acting)

Pneumatic Pendulum Valve (Single Acting)

Pneumatic pendulum valve of vacuum valves for high vacuum chamber control system by Htc vacuum

Pneumatic Pendulum Valve (Single Acting)

Material	Body		A6061-T6
	Gate		A6061-T6
Life Cycle	200,000 cycles
Helium leak rates at 1 atm differential	Body, Aluminum		＜1×10^-9 mbar .l /sec
	Body, Aluminum, hard anodized		＜1×10^-5 mbar .l /sec
Bake Temperature	Body		≤ 120 ℃
	Actuator		≤ 80 ℃
	Solenoid valve		≤ 50 ℃
Pressure Range	Aluminum		1×10^-8 mbar to 1.2 bar
	Aluminum ,hard anodized		1×10^-6 mbar to 1.2 bar
Maximum ΔP	1.2 bar
Max. ΔP during opening	≤ 5 mbar
Compressed air pressure	4 ~ 6 Kg/cm²
Operating time for throttling(s)	ISO 200	ISO 250	ISO 320	ISO 400
	0.9	1.0	1.1	2
gate board moving time * openàclosed(s)	2.0	2.0	2.0	3.5
gate board moving time * closed à open(s)	1.0	1.0	1.0	3
Standard Seal	Gate		Viton O-ring
	Bonnet		Viton O-ring
	Feedthrough		Viton O-ring
Feedthrough	Rotary feedthrough
Actuator	Electro-Pneumatic (normal close)
Position indicator	Reed sensor
Weight	ISO 200	ISO 250	ISO 320	ISO 400
	21Kg	31Kg	51Kg	70 Kg
Mounting position	Horizontal & Vertical
Options	ISO 200 ~ 320	a. Other material of Gate O-ring b. Heater
	ISO 400	a. Other material of Gate O-ring

Control Wiring Externa

[Note] 24AWG wire is recommended.

HTC vacuum pendulum valve is to install a large throttle valve between the process vacuum chamber and the turbine molecular pump inlet. The current pendulum valve design are constructed of body material blank or hard anodized for corrosion resistant and less dust. It's available with ISO200, ISO250, ISO 320 flanges in sizes 8", 10", 12" and can be operated in pneumatic, 3-Position or APC mode. This vacuum valve is usually designed as a gate valve or a pendulum valve, applications in OLED, FPD, Semiconductor and PV industries manufacturing systems.

The pendulum valve used in the CVD process, etching process, and for chemical technology application it can be great safety too. This valve’s body in size is smaller, the space utilization is better, it has less vibration for the process when it is operating, also it is corrosion-resistant. We also have two kinds of surface treatment: the Nickel plating and the Anode hard coating. During it is processing there’s less visibility of dust, and it is easy to disassemble the equipment for maintenance, and no need to dismantle the entire equipment.