- 真空チャンバー
- UHV超高真空チャンバー
- 真空バルブ
- 真空コンポーネント
-
真空ポンプ
- Edwardsターボ分子ポンプ
- スクロール真空ポンプ
- 中古真空ポンプ
-
EBARA ドライポンプキット
- A07 - EBARA dry pump kits
- A10S - EBARA dry pump kits
- A30 - EBARA dry pump kits
- A70W - EBARA dry pump kits
- A150W - EBARA dry pump kits
- 40.20 - EBARA dry pump kits
- 50.20 - EBARA dry pump kits
- 80.25 - EBARA dry pump kits
- 150.40 - EBARA dry pump kits
- AA10 - EBARA dry pump kits
- AA20 - EBARA dry pump kits
- AA40 - EBARA dry pump kits
- AA200 - EBARA dry pump kits
- サニタリーフィッティング
- パフロロエラストマー(FFKM) Oリング
- Local Scrubber 洗浄装置
- Energy-Saving Heat Jacket
スクロール真空ポンプ
The Scroll Vacuum Pump is the right combination of small size, high performance and low cost. A compact, reliable vacuum pump designed for use on clean processes. Not suitable for use with explosives, flammable,toxic, corrosive substances or particles that contain powders. To pump condensable vapors orto pump down from atmospheric pressure in a humid environment (for example, if relative humidity exceeds 60%), you must use the gas ballast that comes with the pump. This pumps is air cooled with an hour counter. Light, oil free and little routine maintenance.
製品の内訳
ISP 250C
Features
- Low ultimate pressure
- High pumping speed
- Contamination Free, no oil maintenance or disposal
- Cost-effective ready to use
- Maximum inlet pressure to 760 Torr
Dimensions for Scroll Vacuum Pump ISP-250C
Oil-Free Dry Scroll Vacuum Pump
Technical data for Scroll Vacuum Pump ISP-250C
Displacement |
|
50 Hz |
15 m3h-1 / 8.8 ft3min-1 |
60 Hz |
18 m3h-1 / 10.6 ft3min-1 |
Peak pumping speed |
|
50 Hz |
12.5 m3h-1 / 7.3 ft3min-1 |
60 Hz |
15 m3h-1 / 8.8 ft3min-1 |
Ultimate total vacuum |
1.6 x 10-2 mbar / 1 x 10-2 Torr |
Inlet connection |
NW25 |
Outlet connection |
NW16 |
Motor power |
0.4 kW |
Electrical supply |
|
1-phase, 50Hz |
200/230 V |
1-phase, 60Hz |
110/115V |
Noise level |
58db (A) |
Vibration |
1.5 mms -1 |
Enclosure rating |
IP44 |
Leak tightness (static) |
10-4 mbar l s-1 |
Operating temperature range |
5 to 40゚C / 41 to 104゚C |
Weight |
|
1-phase pump |
25 kg / 55 lbs |
Applications
- Scanning electron microscopes
- Ion implanters (beamline and end stations)
- General clean pumping applications
- Sputtering
- Turbo pump backing
- Rare gas re-circulation
- Gel drying
- Rotary evaporation
- Centrifugal concentration
- Vacuum ovens
- Glove boxes
- Ideal for chamber roughing