Local Scrubber 洗浄装置

Htc Vacuum provides sales and maintenance services for μ-Bubble Wet Scrubbers, which are micro-bubble water-washing exhaust gas treatment equipment. With high standards and high-quality products, as well as standardized maintenance procedures, Htc Vacuum provides the best exhaust gas treatment services for high-tech industries such as advanced semiconductor manufacturing, making it a trustworthy partner for customers!

Principle of Equipment

The optimized micro-bubbles are generated by utilizing the Venturi principle, changes in pressure, flow rate, and pipe diameter. The micro-bubbles produced by the μ-Bubble Wet Scrubber have smaller particle size, larger contact surface area, and lower buoyancy and residence time in water, effectively increasing the gas dissolution rate and particle capture rate, and improving the capture efficiency of process gases. It is more efficient than traditional water sprinkler-type Wet Scrubbers.

Product Features

Compared to traditional water sprinkler-type Wet Scrubbers, the μ-Bubble Wet Scrubber from Htc Vacuum has the following advantages:

1. It has been proven to efficiently treat PM 2.5 particles in semiconductor and optoelectronic plants, with a particle capture efficiency of >90%, while traditional water sprinkler-type Wet Scrubbers have a capture efficiency of <10%.

2. The negative pressure at the suction inlet is high (-11~-13Kpa), with high water and gas mixing efficiency.

3. It has an automatic cleaning function, which can extend its PM cycle.

4. It reduces the blockage of process dry pumps to increase their life span.

5. It reduces blockages in the downstream plant pipeline, and extends the PM time.

Introduction｜Microbubble wet scrubber waste gas treatment equipment (μ-Bubble Wet Scrubber)

Picture	Equipment Picture	Product Specification
M400 Series
M600-2M2T Series		*With automatic cleaning function and dual system switching operation, increasing the amount of waste gas treatment.
M1200-2M2T Series		*With automatic cleaning function and double system running at the same time, increasing the waste gas treatment capacity.

【Contact Us】

e-mail：ec@high-light.com.tw