Semiconductor Sealed Spindles With Water Cooling
磁性流体フィードスルー
_Non_Flange_Ferrofluid-Feedthrough.gif)
| select | ||
| Model No. | ANS0012WNR10 | ANS0020WNR10 |
| Parts No. | 1000FF053001 | 1000FF053002 |
| ØA | Ø12 +0 / -0.027 | Ø20 +0 / -0.033 |
| B | 179 | 211 |
| C | 109 | 121 |
| D | M25*P1.5 | M30*P1.5 |
| E | 4W*2.5Dp*20Lg | 6W*3.5Dp*25Lg |
| F | 40 | 55 |
| ØJ | 48 | 63 |
| K | 74 | 82 |
| L | 36.5 | 40.5 |
| Select | Model No. | Parts No. | ØA | B | C | D | E | F | ØJ | K | L |
| ANS0012WNR10 | 1000FF053001 | Ø12 +0 / -0.027 | 179 | 109 | M25*P1.5 | 4W*2.5Dp*20Lg | 40 | 48 | 74 | 36.5 | |
| ANS0020WNR10 | 1000FF053002 | Ø20 +0 / -0.033 | 211 | 121 | M30*P1.5 | 6W*3.5Dp*25Lg | 55 | 63 | 82 | 40.5 |
Degree vacuum pressure [Pa]： 10-6
Leakage rate(He) [Pa.m3/sec]： < 10-12
Temperature range(°C)：0~80°C
Applicable Gas：Inert Gas
Housing Material：SUS304
Shaft Material：SUS420
