- Vacuum Chambers
- UHV Vacuum Chamber
-
Vacuum valves
- Vacuum poppet valves
- Aluminum alloy angle valve
- Vacuum Gate Valves
-
Vacuum Butterfly Valves
- APC Butterfly Valve-DeviceNET
- APC butterfly Valve-ModBUS
- APC Butterfly Valve-EtherCAT
- Htc Pneumatic Butterfly Valve
- 3-Position butterfly Valve
- High vacuum butterfly Valve
- Low vacuum Butterfly Valve
- BV-D Series Butterfly Valve
- BV-N Series Butterfly Valve
- X-Series Butterfly Valve
- MBV-LD Series Butterfly Valve
- MBV-AD Series Butterfly Valve
- Rectangular Gate Valve
- Pendulum valve
- Teflon Coating Vacuum Valve
- Vacuum Ball Valve
- Vacuum Check Valves
- Venting Valve/Pumping Valve
- All Metal Valves
- Vacuum Valve kits
- Vacuum Components
-
Vacuum Pump
- Edwards Turbomolecular Pumps
- Scroll Vacuum Pumps
- Refurbished vacuum Pump
-
EBARA Dry Pump Repair kits
- A07 - EBARA dry pump kits
- A10S - EBARA dry pump kits
- A30 - EBARA dry pump kits
- A70W - EBARA dry pump kits
- A150W - EBARA dry pump kits
- 40.20 - EBARA dry pump kits
- 50.20 - EBARA dry pump kits
- 80.25 - EBARA dry pump kits
- 150.40 - EBARA dry pump kits
- AA10 - EBARA dry pump kits
- AA20 - EBARA dry pump kits
- AA40 - EBARA dry pump kits
- AA200 - EBARA dry pump kits
- Sanitary Fittings
- Perfluoroelastomer O'ring (FFKM)
- Local Wet Scrubber
- Energy-Saving Heat Jacket
Heating Gate valves
Customized Gate valves
Customized heating Gate valves
Dimension
Technical Data
|
Material |
Body |
316 S.S. |
|
Gate |
316 S.S. |
|
|
Bellows |
AM350 |
|
|
Cycles until first service |
300,000 cycles |
|
|
Helium leak rates at 1 atm differential |
＜2×10-9 mbar. l / sec for O-ring |
|
|
Temperature |
Valve body |
≤ 200℃ |
|
Valve gate plate |
≤ 200℃ |
|
|
pneumatic actuator |
≤ 80℃ |
|
|
Pressure Range(mbar) |
1x10-8 ～1000 |
|
|
Maximum ΔP |
27 mbar before opening |
|
|
Standard Seal |
Gate |
FFKM O-ring |
|
Bonnet |
Gasket |
|
|
Actuator |
Pneumatic |
|
|
Surface Treatment |
Electrolytic Polished |
|
|
Options |
a. Position indicator |
|
Heating description
Gate plate heating
