加熱式閘閥
客製各式真空閘閥
客製加熱式閘閥
外觀尺寸圖
技術規格
|
Material |
Body |
316 S.S. |
|
Gate |
316 S.S. |
|
|
Bellows |
AM350 |
|
|
Cycles until first service |
300,000 cycles |
|
|
Helium leak rates at 1 atm differential |
＜2×10-9 mbar. l / sec for O-ring |
|
|
Temperature |
Valve body |
≤ 200℃ |
|
Valve gate plate |
≤ 200℃ |
|
|
pneumatic actuator |
≤ 80℃ |
|
|
Pressure Range(mbar) |
1x10-8 ～1000 |
|
|
Maximum ΔP |
27 mbar before opening |
|
|
Standard Seal |
Gate |
FFKM O-ring |
|
Bonnet |
Gasket |
|
|
Actuator |
Pneumatic |
|
|
Surface Treatment |
Electrolytic Polished |
|
|
Options |
a. Position indicator |
|
加熱描述
閘板加熱
